Thermal evaporator Edwards thermal evaporator (Joule effect) equipped with thickness monitor and two power supplies (90 A and 200 A) for codeposition from two sources. It is possible to deposit in high vacuum (up to 10-6 mbar) or in a controlled atmosphere (inert or reactive gas).
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Micro and Nanostructured Materials Lab, Department of Energy Politecnico di Milano Via Ponzio 34/3 I-20133 Milan, Italy |