Field emission scanning electron microscope

Field emission scanning electron microscope FE-SEM working in high vacuum Zeiss Supra 40 equipped with the GEMINI column. The microscope is equipped with the detectors: High efficiency In-lens detector, Everhart-Thornley Secondary Electron Detector e Back-Scattered Electron Detector.

• Acceleration voltage: 200 V - 30kV
• Working distance: 2-30 mm
• Max resolution: 1 nm @ 20kV with In-lens detector

The microscope is also equipped with a microanalysis apparatus for EDS elemental analysis (Oxford Instruments) and a STEM module for scanning transmission electron microscopy.

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